Abstract
Background: Electrothermal microactuators are very promising for wide range of Microelectromechanical Systems (MEMS) applications due to the low voltage requirement and large force produced. Method: A new optimized V-beam electrothermal micro actuator was implemented in variable optical attenuator. In this work, Particle Swarm Optimization (PSO) technique is proposed to design the Vshaped beam. Result: The approach has successfully improved both angular displacement & output force of the microactuator. Entropy generation rate was used as optimization criteria.
Original language | English |
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Pages (from-to) | 62-67 |
Number of pages | 6 |
Journal | Micro and Nanosystems |
Volume | 11 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2019 |
Keywords
- Entropy
- Genetic algorithms
- Microactuators
- PSO
- RF MEMS
- Variable optical attenuator
ASJC Scopus subject areas
- Building and Construction