ملخص
Background: Electrothermal microactuators are very promising for wide range of Microelectromechanical Systems (MEMS) applications due to the low voltage requirement and large force produced. Method: A new optimized V-beam electrothermal micro actuator was implemented in variable optical attenuator. In this work, Particle Swarm Optimization (PSO) technique is proposed to design the Vshaped beam. Result: The approach has successfully improved both angular displacement & output force of the microactuator. Entropy generation rate was used as optimization criteria.
اللغة الأصلية | English |
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الصفحات (من إلى) | 62-67 |
عدد الصفحات | 6 |
دورية | Micro and Nanosystems |
مستوى الصوت | 11 |
رقم الإصدار | 1 |
المعرِّفات الرقمية للأشياء | |
حالة النشر | Published - 2019 |
ASJC Scopus subject areas
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