TY - GEN
T1 - The Effect of Loading Type, Anchoring Type, and Material Selection on a MEMS Switch Design
AU - Obeid, Abdelhaleem
AU - Zarog, Musaab
N1 - Publisher Copyright:
© 2023 American Institute of Physics Inc.. All rights reserved.
PY - 2023/12/29
Y1 - 2023/12/29
N2 - Radio Frequency Microelectromechanical (RF MEMS) switches proved to be a good potential to replace conventional microelectronic switches in telecommunication applications. An analytical approach was carried out in this paper to calculate the effect of loading type, anchoring type, and material selection on the performance of a MEMS switch. It is found that the location of the load has a large effect on the switch performance and beam characteristics (electrostatic force, pull-down voltage, mechanical restoring force... etc). In addition, the selection of the anchor type as well as the method of connecting the MEMS switch to the circuit has a significant effect on the switch design and performance. The effect of anchoring type and design of the switch (in the case of cantilever and fixed-fixed beam) is discussed. Finally, the effect of the MEMS material type on the design of MEMS switches was investigated to demonstrate its effect on the switching time, the force required to pull the switch down, and the pull-down voltage.
AB - Radio Frequency Microelectromechanical (RF MEMS) switches proved to be a good potential to replace conventional microelectronic switches in telecommunication applications. An analytical approach was carried out in this paper to calculate the effect of loading type, anchoring type, and material selection on the performance of a MEMS switch. It is found that the location of the load has a large effect on the switch performance and beam characteristics (electrostatic force, pull-down voltage, mechanical restoring force... etc). In addition, the selection of the anchor type as well as the method of connecting the MEMS switch to the circuit has a significant effect on the switch design and performance. The effect of anchoring type and design of the switch (in the case of cantilever and fixed-fixed beam) is discussed. Finally, the effect of the MEMS material type on the design of MEMS switches was investigated to demonstrate its effect on the switching time, the force required to pull the switch down, and the pull-down voltage.
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U2 - 10.1063/5.0164096
DO - 10.1063/5.0164096
M3 - Conference contribution
AN - SCOPUS:85182356923
T3 - AIP Conference Proceedings
BT - AIP Conference Proceedings
A2 - Dharma, Irfan Aditya
A2 - Puspasari, Ifa
A2 - Murnani, Suatmi
A2 - Sugarindra, Muchamad
A2 - Rahma, Fadilla Noor
PB - American Institute of Physics Inc.
T2 - 4th International Conference on Engineering and Technology for Sustainable Development, ICET4SD 2021
Y2 - 13 December 2021
ER -