On the implementation of adaptive sliding mode robust controller in the stabilization of electrically actuated micro-tunable capacitor

Hamed Mobki, Amin Majidzadeh Sabegh, Aydin Azizi, Hassen M. Ouakad*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


Parallel-plates based micro-tunable capacitors are known to have low travel ranges, which deteriorate as going even lower in terms of their initials gap sizes. Such conditions have put strict requirements on the operation of such designs and hence hindering their use in numerous practical applications requiring high tunability. This work is proposed to examine the possibility to implement a closed-loop control strategy to increase the maximum capacitance and therefore tunability of micro tunable capacitors. The suggested control strategy is implemented on an electrostatically actuated parallel-plates (one stationary and one movable) based micro-capacitor and had an objective to stabilize the movable electrode when it is close to the fixed one for the sake of maximizing its maximum capacitance and possibly improving its overall tunability. Robustness of the micro-capacitor to the so-called pull-in phenomenon (short-circuit instability) when using the closed loop control scheme is studied. Indeed, an adaptive sliding mode controller is designed to compensate the effects of uncertainty, disturbance and eliminate any possibility for chattering phenomenon. The controller proficiencies in terms of stabilizing the micro-capacitor and its robustness to uncertainty as well as disturbance have been thoroughly examined. Furthermore, the effects of the control parameters on the behavior of micro-capacitor, such as overshoot, settling time, steady state error, robustness to uncertainty, external disturbances and to the chattering phenomenon, have been completely inspected. The obtained results indicated satisfactory proficiency and trustworthiness of the proposed control strategy to achieve high level of tunability and maximum capacitance.

Original languageEnglish
Pages (from-to)3903-3916
Number of pages14
JournalMicrosystem Technologies
Issue number12
Publication statusAccepted/In press - Jan 1 2020
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


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