TY - GEN
T1 - A novel threshold pressure sensor based on nonlinear dynamics of MEMS arches
AU - Hasan, Mohammad H.
AU - Alsaleem, Fadi M.
AU - Ouakad, Hassen M.
N1 - Publisher Copyright:
© Copyright 2017 ASME.
PY - 2017
Y1 - 2017
N2 - In this paper, we propose a new tunable pressure sensor based on the nonlinear snap-through instability of an electrically actuated shallow arch microbeam. The general concept of the sensor can be explained as follows: the shallow arch is excited to trigger dynamic snap-through instability yielding a high output amplitude, if the system operating pressure is below a threshold value. This state is interpreted as a digital logic 1. Once the varying pressure exceeds that threshold value, the arch gains its stability. Therefore, the new state would be interpreted as a digital logic 0 value. We show an example of an operation range of the proposed sensor by identifying the relationship between the excitation AC voltage and the critical cut-off pressure.
AB - In this paper, we propose a new tunable pressure sensor based on the nonlinear snap-through instability of an electrically actuated shallow arch microbeam. The general concept of the sensor can be explained as follows: the shallow arch is excited to trigger dynamic snap-through instability yielding a high output amplitude, if the system operating pressure is below a threshold value. This state is interpreted as a digital logic 1. Once the varying pressure exceeds that threshold value, the arch gains its stability. Therefore, the new state would be interpreted as a digital logic 0 value. We show an example of an operation range of the proposed sensor by identifying the relationship between the excitation AC voltage and the critical cut-off pressure.
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U2 - 10.1115/DETC2017-67874
DO - 10.1115/DETC2017-67874
M3 - Conference contribution
AN - SCOPUS:85035069440
T3 - Proceedings of the ASME Design Engineering Technical Conference
BT - 13th ASME/IEEE International Conference on Mechatronic and Embedded Systems and Applications
PB - American Society of Mechanical Engineers(ASME)
T2 - ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017
Y2 - 6 August 2017 through 9 August 2017
ER -