TY - JOUR
T1 - X-ray diffraction measurement of residual stress in sol-gel grown lead zirconate titanate thick films on nickel-based super alloy substrate
AU - Hoshyarmanesh, Hamidreza
AU - Nehzat, Naser
AU - Salehi, Mehdi
AU - Ghodsi, Mojtaba
N1 - Publisher Copyright:
© 2015, The Korean Society of Mechanical Engineers and Springer-Verlag Berlin Heidelberg.
PY - 2015
Y1 - 2015
N2 - Residual compressive stress of Pb(Zr0.52Ti0.48)O3 thick films was investigated using residual strains derived from X-ray diffraction patterns. Sin2ψ method was applied for the 5, 10 and 15 µm sol-gel derived thick films annealed at 700°C for 1 hr as high frequency structural health monitoring square-shape transducers of 10×10 mm, deposited onto the curved nickel-based super alloy substrates. A triaxial model was proposed based on piezoelectric constitutive equations, and Bragg’s law at a large diffraction angle (∼89º) was utilized considering the electromechanical coupling factor as well as elastic, dielectric and piezoelectric constants. Thickness variations led to a significant change in residual stress magnitudes delineated from more-accurate triaxial model compared to small angle plane-stress results not considering the piezoelectric coupling effects.
AB - Residual compressive stress of Pb(Zr0.52Ti0.48)O3 thick films was investigated using residual strains derived from X-ray diffraction patterns. Sin2ψ method was applied for the 5, 10 and 15 µm sol-gel derived thick films annealed at 700°C for 1 hr as high frequency structural health monitoring square-shape transducers of 10×10 mm, deposited onto the curved nickel-based super alloy substrates. A triaxial model was proposed based on piezoelectric constitutive equations, and Bragg’s law at a large diffraction angle (∼89º) was utilized considering the electromechanical coupling factor as well as elastic, dielectric and piezoelectric constants. Thickness variations led to a significant change in residual stress magnitudes delineated from more-accurate triaxial model compared to small angle plane-stress results not considering the piezoelectric coupling effects.
KW - PZT thick film
KW - Sol-gel deposition
KW - Supper alloy substrate
KW - Triaxial residual stress
KW - X-ray diffraction
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U2 - 10.1007/s12206-015-0131-0
DO - 10.1007/s12206-015-0131-0
M3 - Article
AN - SCOPUS:84923134046
SN - 1819-7140
VL - 9
SP - 715
EP - 721
JO - Russian Journal of Pacific Geology
JF - Russian Journal of Pacific Geology
IS - 1
ER -