Pt/3C-SiC electrothermal cantilever for MEMS-based mixers

Microelectromechanical resonators are currently applied as MEMS-based mixers-filter for communication systems. Silicon carbide, as a material with high potentiality to replace silicon material, can be utilised in the design of MEMS-based mixers. A Pt/SiC electrothermal actuator, resonating at fundamental frequency of 117.1 kHz, was fabricated and designed to perform frequency mixing. Two signals were multiplied and the sum, as well as the difference, was used to drive the fabricated cantilever into resonance.