ملخص
Scatter plate interferometers provide a precise method to test the quality of concave mirrors. In this article we describe a method to integrate a scatter plate and a projection lens into a single binary micro-optical element, which is a crucial part of the scatter plate interferometer. We have designed an integrated element with the aid of a computer and fabricated it using the e-beam lithography method. We present experimental verification and some computer simulation results.
اللغة الأصلية | English |
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الصفحات (من إلى) | 1587-1590 |
عدد الصفحات | 4 |
دورية | Review of Scientific Instruments |
مستوى الصوت | 69 |
رقم الإصدار | 4 |
المعرِّفات الرقمية للأشياء | |
حالة النشر | Published - أبريل 1998 |
منشور خارجيًا | نعم |
ASJC Scopus subject areas
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