TY - GEN
T1 - Enhancement of Greenhouse Gas Sensing Performance Using a Heated Micro-Resonator with Lorentz-Forces
AU - Shalabi, Ahmad T.
AU - Mbarek, Sofiane Ben
AU - Ouakad, Hassen M.
AU - Alcheikh, Nouha
N1 - Publisher Copyright:
© 2023 IEEE.
PY - 2023
Y1 - 2023
N2 - This paper presents a novel approach to developing high-performance gas sensors by leveraging electrothermally actuated buckled micro-beams driven by Lorentz forces. Previous straight beam micro-resonator-based gas sensors take advantage of the buckling bifurcation and suffer from low sensitivity with the presence of DC electrostatic voltage. In this work, we used an electromagnetic actuation in order to maximize the slope at both pre/post-buckling and around the buckling point, thereby enhancing the sensitivity of sensor. An analytical model is developed to understand and verify the micro-sensor performance with good agreement reported with the experimental data. The results indicate significant improvements in the slope (sensitivity), power consumption, and driving voltage, providing valuable insights for the design and optimization of gas sensors targeting greenhouse gases.
AB - This paper presents a novel approach to developing high-performance gas sensors by leveraging electrothermally actuated buckled micro-beams driven by Lorentz forces. Previous straight beam micro-resonator-based gas sensors take advantage of the buckling bifurcation and suffer from low sensitivity with the presence of DC electrostatic voltage. In this work, we used an electromagnetic actuation in order to maximize the slope at both pre/post-buckling and around the buckling point, thereby enhancing the sensitivity of sensor. An analytical model is developed to understand and verify the micro-sensor performance with good agreement reported with the experimental data. The results indicate significant improvements in the slope (sensitivity), power consumption, and driving voltage, providing valuable insights for the design and optimization of gas sensors targeting greenhouse gases.
KW - Clamped-clamped resonator
KW - Electrothermal and electrostatic actuation
KW - Gas sensor
KW - Heating/cooling effect
KW - Lorentz force actuation
UR - http://www.scopus.com/inward/record.url?scp=85185716302&partnerID=8YFLogxK
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U2 - 10.1109/PowerMEMS59329.2023.10417156
DO - 10.1109/PowerMEMS59329.2023.10417156
M3 - Conference contribution
AN - SCOPUS:85185716302
T3 - PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
SP - 23
EP - 26
BT - PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2023
Y2 - 11 December 2023 through 14 December 2023
ER -