TY - JOUR
T1 - A highly sensitive and wide-range resonant magnetic micro-sensor based on a buckled micro-beam
AU - Alcheikh, N.
AU - Ben. Mbarek, S.
AU - Ouakad, H. M.
AU - Younis, M. I.
N1 - Funding Information:
This research has been supported through King Abdullah University of Science and Technology (KAUST) fund.
Funding Information:
Mohammad I. Younis received a Ph.D. degree in engineering mechanics from Virginia Polytechnic Institute and State University, Blacksburg, VA, in 2004. From 2004–2013 he served as an assistant and then as an associate professor of Mechanical Engineering at the State University of New York (SUNY), Binghamton, NY. In 2013, he moved to King Abdullah University of Science and Technology, Saudi Arabia, where he is serving now as a full professor of Mechanical Engineering and a Director of the MEMS and NEMS Characterization and Motion Laboratory. Dr. Younis is a recipient of the SUNY Chancellor’s Award for Excellence in Scholarship and Creative Activities in 2012, the National Science Foundation Faculty Early Career Development Award in 2009, and the Paul E. Torgersen Graduate Research Excellence Award in 2002. He holds several U.S. patents in MEMS sensors and actuators. He serves as an Associate Editor of Nonlinear Dynamics, Journal of Computational and Nonlinear Dynamics, Journal of Vibration and Control, and Meccanica. He is a member of the American Society of Mechanical Engineers ASME and IEEE.
Publisher Copyright:
© 2021
PY - 2021/9/1
Y1 - 2021/9/1
N2 - We experimentally demonstrate a miniature highly sensitive wide-range resonant magnetic Lorentz-force micro-sensor. The concept is demonstrated based on the detection of the resonance frequency of an in-plane electrothermally heated straight resonator operated near the buckling point. The frequency shift is measured with optical sensing (laser) and the device is operated at atmospheric pressure. The frequency shift of the micro-sensor becomes very sensitive to any external disturbances around the buckling zone as indicated by the analytical model and experimental data, which show high sensitivity. The magnetometer demonstrates a measured sensitivity (S) of 33.9/T, which is very high compared to the state of the art. In addition, the micro-sensor shows a bi-linear behaviour with good linearity in two magnetic field regimes, low and high, with low power consumption around 0.2 mW. These attractive features make the proposed micro-sensor promising for various low-cost magnetic applications.
AB - We experimentally demonstrate a miniature highly sensitive wide-range resonant magnetic Lorentz-force micro-sensor. The concept is demonstrated based on the detection of the resonance frequency of an in-plane electrothermally heated straight resonator operated near the buckling point. The frequency shift is measured with optical sensing (laser) and the device is operated at atmospheric pressure. The frequency shift of the micro-sensor becomes very sensitive to any external disturbances around the buckling zone as indicated by the analytical model and experimental data, which show high sensitivity. The magnetometer demonstrates a measured sensitivity (S) of 33.9/T, which is very high compared to the state of the art. In addition, the micro-sensor shows a bi-linear behaviour with good linearity in two magnetic field regimes, low and high, with low power consumption around 0.2 mW. These attractive features make the proposed micro-sensor promising for various low-cost magnetic applications.
KW - Buckling zone
KW - Lorentz-force magnetic sensor
KW - Straight micro-resonators
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U2 - 10.1016/j.sna.2021.112768
DO - 10.1016/j.sna.2021.112768
M3 - Article
AN - SCOPUS:85104986978
SN - 0924-4247
VL - 328
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
M1 - 112768
ER -