TY - GEN
T1 - A Comparative Study of Cantilever Profiles for MEMS Applications
AU - Mishra, Shubham Kumar
AU - Chauhan, Shivanku
AU - Zahid Ansari, Mohd
AU - Husain, Afzal
N1 - Publisher Copyright:
© The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2024.
PY - 2024
Y1 - 2024
N2 - The micro-electro-mechanical system (MEMS) is a revolutionary enabling technology that has been the driving factor behind many recent technological advances. Many of these microsystems are made up in the form of microcantilevers and are designed to carry out specific tasks by monitoring variations in cantilever bending or vibrational frequency. In order to determine the optimal cantilever profile for both dynamic and static modes, modal analysis is done on the various cantilever profiles in this work. Additionally, all the simulation findings are validated with analytical results from past literature. Out of the three profiles tested in the work, the varying-width profile performed better from a resonant frequency point of view. In static mode, a varying-width profile is also better from a stress point of view.
AB - The micro-electro-mechanical system (MEMS) is a revolutionary enabling technology that has been the driving factor behind many recent technological advances. Many of these microsystems are made up in the form of microcantilevers and are designed to carry out specific tasks by monitoring variations in cantilever bending or vibrational frequency. In order to determine the optimal cantilever profile for both dynamic and static modes, modal analysis is done on the various cantilever profiles in this work. Additionally, all the simulation findings are validated with analytical results from past literature. Out of the three profiles tested in the work, the varying-width profile performed better from a resonant frequency point of view. In static mode, a varying-width profile is also better from a stress point of view.
KW - Cantilever sensor
KW - MEMS
KW - Resonant frequency
UR - http://www.scopus.com/inward/record.url?scp=85206221232&partnerID=8YFLogxK
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U2 - 10.1007/978-981-97-3651-5_11
DO - 10.1007/978-981-97-3651-5_11
M3 - Conference contribution
AN - SCOPUS:85206221232
SN - 9789819736508
T3 - Lecture Notes in Mechanical Engineering
SP - 119
EP - 128
BT - Recent Advances in Machine Design - Proceedings of ISME 2023
A2 - Chandrashekara, C.V.
A2 - Mathivanan, N. Rajesh
A2 - Hariharan, K.
PB - Springer Science and Business Media Deutschland GmbH
T2 - 21st ISME International conference on Advances in Mechanical Engineering, ISME 2023
Y2 - 13 July 2023 through 15 July 2023
ER -